Magnetic write head fabrication with integrated electrical lapping guides
AssigneeHGST Netherlands B.V.
InventorsDonald Allen, Jennifer Ai-Ming Leung, Aron Pentek, Thomas Roucoux
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Abstract
Methods of fabricating magnetic write heads and electrical lapping guides (ELG's) using a split gap deposition process is described. A removal process is performed on a magnetic material to define a main write pole and to define a corresponding ELG for the main write pole. A first non-magnetic gap layer is deposited. A mask and liftoff process is performed to deposit an electrically conductive material on the first gap layer disposed along a front edge of the ELG. A second non-magnetic gap layer is then deposited and a shield is fabricated for the write pole.
Claims20
A method of fabricating a magnetic write head, the method comprising:
- depositing magnetic material;
- forming a first mask structure on the magnetic material that defines a shape for a main write pole and a corresponding electrical lapping guide (ELG) having a front edge;
- performing a removal process which removes the magnetic material exposed by the first mask structure to define the main write pole and the ELG having the front edge;
- removing the first mask structure;
- depositing a first non-magnetic gap layer;
- forming a second mask structure on the first gap layer that has an opening exposing at least a portion of the first gap layer disposed along the front edge of the ELG;
- depositing an electrically conductive material on the first gap layer exposed by the opening of second mask structure;
- removing the second mask structure;
- depositing a second non-magnetic gap layer;
- and
- fabricating a shield for the main write pole.
A method of fabricating a magnetic write head, the method comprising:
- fabricating a main write pole for the write head and a corresponding electrical lapping guide (ELG), wherein the ELG comprises:
- a magnetic material having a front edge;
- a first non-magnetic gap layer disposed along the front edge;
- an electrically conductive material on at least a portion of the first gap layer disposed along the front edge;
- and
- a second non-magnetic gap layer on the electrically conductive material;
- and
- fabricating a shield for the main write pole.
Dependencies are inferred from the claim text.