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US 2012/0086306 A1Published application
Micromechanical resonating devices and related methods
AssigneeSand9, Inc.
InventorsALEXEI GAIDARZHY, Pritiraj Mohanty
Life of this patent
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Abstract
Micromechanical resonating devices, as well as related methods, are described herein. The resonating devices can include a micromechanical resonating structure, an actuation structure that actuates the resonating structure, and a detection structure that detects motion of the resonating structure.
Claims10
An apparatus, comprising:
- a suspended mechanical resonating structure;
- and
- a bias structure disposed proximate a first side of the suspended mechanical resonating structure and separated from the suspended mechanical resonating structure by a first gap,
- wherein the bias structure is configured to tune a resonance frequency of the suspended mechanical resonating structure by applying a bias to the suspended mechanical resonating structure.
1 more element
A method of operating a suspended mechanical resonating structure, the method comprising:
- tuning an operation frequency of the suspended mechanical resonating by applying a bias to the suspended mechanical resonating structure using a first bias structure separated from the suspended mechanical resonating structure by a first gap.
Dependencies are inferred from the claim text.