Radiation-sensitive resin composition, polymer and compound

A polymer comprising a fluorine atom and at least one repeating unit among repeating units shown by formulas (P-1) to (P-3),

• wherein L represents a (b+1)-valent linking group, LB represents a single bond or a (b+1)-valent linking group, RP represents a monovalent organic group, Z1 represents a carbon atom, Z2 represents a trivalent group that forms a cyclic hydrocarbon group together with Z1, Q0 in the formula (P-1) individually represent a hydrogen atom or a monovalent group, provided that at least one of Q0 represents a monovalent organic group that includes an electron-withdrawing group, Q0 in the formula (P-3) represents a monovalent organic group that includes an electron-withdrawing group, provided that a case where all of Q0 in the formula (P-1) represent a fluorine atom or a fluorine-substituted hydrocarbon group is excluded, and b in the formulas (P-1) and (P-2) is an integer from 1 to 5, provided that a plurality of RP and a plurality of Q0 may respectively be either the same or different when b is an integer from 2 to 5, b in the formula (P-3) is 1 when LB represents a single bond, and is an integer from 1 to 5 when LB does not represent a single bond, provided that a plurality of RP, a plurality of Z2, and a plurality of Q0 may respectively be either the same or different when b is an integer from 2 to 5, and RM represents any of groups shown by following formulas,
• wherein RM1 represents a hydrogen atom, a fluorine atom, an alkyl group having 1 to 5 carbon atoms, or a fluoroalkyl group having 1 to 5 carbon atoms, RE represents a substituent, d is an integer from 0 to 4, provided that a plurality of RE may be either the same or different when d is an integer from 2 to 4, e is 0 or 1, and “*1” indicates a bonding hand bonded to L or LB.

A compound comprising a fluorine atom and shown by any of formulas (M-1) to (M-3),

• wherein L represents a (b+1)-valent linking group, LB represents a single bond or a (b+1)-valent linking group, RT represents a hydrogen atom or a monovalent organic group, Z1 represents a carbon atom, Z2 represents a trivalent group that forms a cyclic hydrocarbon group together with Z1, Q0 in the formula (M-1) individually represent a hydrogen atom or a monovalent group, provided that at least one of Q0 represents a monovalent organic group that includes an electron-withdrawing group, Q0 in the formula (M-3) represents a monovalent organic group that includes an electron-withdrawing group, provided that a case where all of Q0 in the formula (M-1) represent a fluorine atom or a fluorine-substituted hydrocarbon group is excluded, b in the formulas (M-1) and (M-2) is an integer from 1 to 5, provided that a plurality of RT and a plurality of Q0 may respectively be either the same or different when b is an integer from 2 to 5, b in the formula (M-3) is 1 when LB represents a single bond, and is an integer from 1 to 5 when LB does not represent a single bond, provided that a plurality of RT, a plurality of Z2, and a plurality of Q0 may respectively be either the same or different when b is an integer from 2 to 5, and R0 represents any of groups shown by following formulas,
• wherein RM1 represents a hydrogen atom, a fluorine atom, an alkyl group having 1 to 5 carbon atoms, or a fluoroalkyl group having 1 to 5 carbon atoms, RE represents a substituent, d is an integer from 0 to 4, provided that a plurality of RE may be either the same or different when d is an integer from 2 to 4, e is 0 or 1, and “*3” indicates a bonding hand bonded to L or LB.