# US 2012/0073377 A1 · Enhanced static-dynamic pressure transducer suitable for use in gas turbines and other compressor applications

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- Number: US 2012/0073377 A1
- Document ID: US20120073377A1
- Status: Published application
- Kind: A1
- Application number: 13/312,381
- Filed: 2011-12-06
- Published: 2012-03-29
- Earliest claimed: 2009-11-09
- Assignees: Kulite Semiconductor Products, Inc.
- Inventors: Anthony D. Kurtz; Nora Kurtz; Boaz Kochman; Adam Hurst; Tonghuo Shang
- Web page: https://patentgrep.com/patent/US20120073377A1

## CPC

- G01L 19/00: Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L 9/0052: {of piezoresistive elements (circuits therefor G01L9/06)}
- G01L 15/00: Devices or apparatus for measuring two or more fluid pressure values simultaneously
- G01L 19/0609: {Pressure pulsation damping arrangements}
- G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G)

## Abstract

A transducer comprising a filter assembly that measures low amplitude, dynamic pressure perturbations superimposed on top of a high static pressure through the implementation of a low-pass mechanical filter assembly. The filter assembly may comprise a dual lumen reference tube and a removable filter subassembly further comprising a porous metal filter and narrow diameter tube. The transducer, which may be capable of operating at ultra-high temperatures and in harsh environments, may comprise of a static piezoresistive pressure sensor, which measures the large pressures on the order of 200 psi and greater, and an ultrasensitive, dynamic piezoresistive pressure sensor which may capture small, high frequency pressure oscillations on the order of a few psi. The filter assembly may transmit static pressure to the back of the dynamic pressure sensor to cancel out the static pressure present at the front of the sensor while removing dynamic pressure.

## Claims

### Claim 1

A pressure transducer adapted to measure static and dynamic pressure of an applied pressure, comprising:
a first sensor adapted to output a signal substantially indicative of static pressure;
a filter adapted to remove dynamic pressure and pass through static pressure; and
a second sensor having a first side that receives both static and dynamic pressure and a second side that receives the passed through static pressure from the filter, such that the static pressure applied to the first and second sides is canceled out, therefore enabling the second sensor to output a signal substantially indicative of dynamic pressure.

### Claim 2 (depends on 1)

The transducer of claim 1, wherein the filter comprises a removable filter subassembly.

### Claim 3 (depends on 2)

The transducer of claim 2, wherein the removable filter subassembly can be removed from the filter and replaced with a different filter subassembly to adjust the filtering properties of the filter.

### Claim 4 (depends on 2)

The transducer of claim 2, wherein the removal filter subassembly comprises a body defining an elongate chamber having a first end adapted to receive both dynamic and static pressure and a second end adapted to pass through static pressure.

### Claim 5 (depends on 4)

The transducer of claim 4, wherein the elongate chamber further comprises a porous metal filter.

### Claim 6 (depends on 5)

The transducer of claim 5, wherein the porous metal filter has substantially uniform pore size.

### Claim 7 (depends on 4)

The transducer of claim 4, wherein the body has threads on its exterior surface and the first end has a shape adapted to be engaged by a tool, wherein the removable filter subassembly can be attached and detached by threading and unthreading the removable filter subassembly.

### Claim 8 (depends on 1)

The transducer of claim 1, further comprising a reference tube disposed between the filter and the second side of the second sensor, wherein the reference tube is adapted to further remove dynamic pressure and route static pressure to the second side of the second sensor.

### Claim 9 (depends on 8)

The transducer of claim 8, wherein the reference tube comprises a first tube fitted within a second tube.

### Claim 10 (depends on 8)

The transducer of claim 8, further comprising a restrictor tube disposed between the filter and the reference tube and adapted to further remove dynamic pressure.

### Claim 11 (depends on 1)

The transducer of claim 1, wherein the first sensor comprises a first deflecting diaphragm.

### Claim 12 (depends on 1)

The transducer of claim 1, wherein the second sensor comprises a second deflecting diaphragm.

### Claim 13

A method of measuring static and dynamic pressure of an applied pressure, comprising:
outputting a first signal substantially indicative of static pressure using a first sensor;
removing dynamic pressure and passing through static pressure using a filter; and
outputting a second signal substantially indicative of dynamic pressure using a second sensor, wherein the second sensor has a first side that receives both static and dynamic pressure and a second side that receives the passed through static pressure from the filter, such that the static pressure applied to the first and second sides is canceled out.

### Claim 14 (depends on 13)

The method of claim 13, further comprising routing the passed through static pressure from the filter to the second side of the second sensor using a reference tube disposed between the filter and the second side of the second sensor.

### Claim 15 (depends on 14)

The method of claim 14, wherein the reference tube further removes dynamic pressure.

### Claim 16 (depends on 13)

The method of claim 13, wherein the filter comprises a removable filter subassembly.

### Claim 17 (depends on 16)

The method of claim 16, further comprising adjusting the filter properties of the filter by removing the removable filter subassembly from the filter and replacing it with a different filter subassembly.
