Method of correcting measurement data of a coordinate measuring machine and a coordinate measuring machine
AssigneeMitutoyo Corporation
InventorsMitsuru Fukuda, Kazumi Mizukami, Masao Suzuki, Takahiro Morosawa
Life of this patent
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Abstract
A method according to the invention includes measuring respective geometric errors that occur in a three-dimensional movement mechanism when different weights are applied to a ram, storing in a storage section respective correction parameters for correcting the respective geometric errors measured for the different weights, inputting weight information of a probe attached to the ram, reading from the storage section one of the correction parameters that corresponds to the inputted weight information, and correcting measurement data with the read correction parameter.
Claims5
A method of correcting measurement data of a coordinate measuring machine, the coordinate measuring machine comprising:
- a table on which an object is to be mounted;
- a ram that has an end attached with a probe in an exchangeable manner;
- and a three-dimensional movement mechanism that causes a relative movement between the table and the ram in a three-dimensional direction, the method comprising:
- measuring respective geometric errors that occur in the three-dimensional movement mechanism when different weights are applied to the ram;
- storing in a storage section respective correction parameters for correcting the respective geometric errors measured for the different weights;
- inputting weight information of the probe attached to the ram;
- reading from the storage section one of the correction parameters that corresponds to the inputted weight information;
- and
- correcting the measurement data with the read correction parameter.
A method of correcting measurement data of a coordinate measuring machine, the coordinate measuring machine comprising:
- a table on which an object is to be mounted;
- a ram that has an end attached with a probe in an exchangeable manner;
- and a three-dimensional movement mechanism that causes a relative movement between the table and the ram in a three-dimensional direction, the method comprising:
- measuring a geometric error that occurs in the three-dimensional movement mechanism when a reference weight corresponding to a reference probe is applied to the ram;
- storing in a storage section a reference correction parameter for correcting the measured geometric error;
- inputting weight information of the probe attached to the ram;
- calculating a correction factor from the inputted weight information and the reference weight corresponding to the reference probe;
- calculating a correction parameter for the probe attached to the ram from the correction factor and the reference correction parameter stored in the storage section;
- and
- correcting the measurement data with the calculated correction parameter.
A coordinate measuring machine comprising:
- a table on which an object is to be mounted;
- a ram that has an end attached with a probe in an exchangeable manner;
- a three-dimensional movement mechanism that causes a relative movement between the ram and the table in a three-dimensional direction;
- a storage section that stores respective correction parameters for correcting respective geometric errors that occur in the three-dimensional movement mechanism when different weights are applied to the ram;
- an input unit through which weight information of the probe attached to the ram is inputted;
- and
- a correction calculating unit that reads from the storage section one of the correction parameters that corresponds to the weight information inputted through the input unit, and corrects measurement data with the read correction parameter.
Dependencies are inferred from the claim text.