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US 2012/0072149 A1Published application
Esd verification apparatus, esd verification method and esd verification program
AssigneeKabushiki Kaisha Toshiba
InventorsAmutha Alagasamy, Kazuho Nagatsuka
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Abstract
An ESD verification apparatus for a semiconductor circuit has a replacement part, a first table making part, a second table making part, a third table making part, a fourth table making part, a fifth table making part, a comparator and an indicator. The indicator indicates to an operator a combination and a path of the corresponding pads when the comparator determines that current-flowing-easiness of a current path via the ESD protection element does not coincide with current-flowing-easiness of a current path not via the ESD protection element between any pads in the plurality of pads.
Claims20
An ESD verification apparatus for a semiconductor circuit which comprises a plurality of pads, an internal circuit connected to the pads and at least one of an ESD protection element connected to two pads in the plurality of pads, comprising:
- a replacement part configured to replace each PN junction part in the internal circuit and the ESD protection element, a gate-to-source capacitance and a capacitor with a rectifier, respectively;
- a first table making part configured to make a first table which stores a numerical value expressing current-flowing-easiness of a current path flowing from one end to another end of the ESD protection element between the two pads connected to the ESD protection element for each of the ESD protection element;
- a second table making part configured to make a second table which stores a numerical value expressing current-flowing-easiness of a current path flowing from another end to one end of the ESD protection element between the two pads connected to the ESD protection element for each of the ESD protection element;
- a third table making part configured to make a third table which selects and stores a numerical value expressing current-flowing-easiness of a current path flowing more easily in current paths between two pads connected to the ESD protection element in the first and second tables;
- a fourth table making part configured to make a fourth table which stores numerical values expressing current-flowing-easiness of all current paths via the ESD protection element between any pads among the plurality of pads based on the third table;
- a fifth table making part configured to make a fifth table which stores numerical values expressing current-flowing-easiness between any pads in the plurality of pads at a state of removing all the ESD protection element from the semiconductor circuit;
- a comparator configured to compare current-flowing-easiness of a current path via the ESD protection element with current-flowing-easiness of a current path not via the ESD protection element between any pads in the plurality of pads based on the fourth and fifth tables;
- and
- an indicator configured to indicate to an operator a combination and a path of the corresponding pads when the comparator determines that current-flowing-easiness of a current path via the ESD protection element does not coincide with current-flowing-easiness of a current path not via the ESD protection element between any pads in the plurality of pads.
6 more elements
An ESD verification method of a semiconductor circuit which comprises a plurality of pads, an internal circuit connected to the pads and at least one of an ESD protection element connected to two pads in the plurality of pads, comprising:
- replacing each PN junction part in the internal circuit and the ESD protection element, a gate-to-source capacitance and a capacitor with a rectifier, respectively;
- making a first table which stores a numerical value expressing current-flowing-easiness of a current path flowing from one end to another end of the ESD protection element between the two pads connected to the ESD protection element for each of the ESD protection element;
- making a second table which stores a numerical value expressing current-flowing-easiness of a current path flowing from another end to one end of the ESD protection element between the two pads connected to the ESD protection element for each of the ESD protection element;
- making a third table which selects and stores a numerical value expressing current-flowing-easiness of a current path flowing more easily in current paths between two pads connected to the ESD protection element in the first and second tables;
- making a fourth table which stores numerical values expressing current-flowing-easiness of all current paths via the ESD protection element between any pads among the plurality of pads based on the third table;
- making a fifth table which stores numerical values expressing current-flowing-easiness between any pads in the plurality of pads at a state of removing all the ESD protection element from the semiconductor circuit;
- comparing current-flowing-easiness of a current path via the ESD protection element with current-flowing-easiness of a current path not via the ESD protection element between any pads in the plurality of pads based on the fourth and fifth tables;
- and
- indicating to an operator a combination and a path of the corresponding pads when the comparator determines that current-flowing-easiness of a current path via the ESD protection element does not coincide with current-flowing-easiness of a current path not via the ESD protection element between any pads in the plurality of pads.
6 more elements
A computer-readable storage medium which stores a program causing a computer to make ESD verification of a semiconductor circuit which comprises a plurality of pads, an internal circuit connected to the pads and at least one of an ESD protection element connected to two pads in the plurality of pads, the program comprising:
- replacing each PN junction part in the internal circuit and the ESD protection element, a gate-to-source capacitance and a capacitor with a rectifier, respectively;
- making a first table which stores a numerical value expressing current-flowing-easiness of a current path flowing from one end to another end of the ESD protection element between the two pads connected to the ESD protection element for each of the ESD protection element;
- making a second table which stores a numerical value expressing current-flowing-easiness of a current path flowing from another end to one end of the ESD protection element between the two pads connected to the ESD protection element for each of the ESD protection element;
- making a third table which selects and stores a numerical value expressing current-flowing-easiness of a current path flowing more easily in current paths between two pads connected to the ESD protection element in the first and second tables;
- making a fourth table which stores numerical values expressing current-flowing-easiness of all current paths via the ESD protection element between any pads among the plurality of pads based on the third table;
- making a fifth table which stores numerical values expressing current-flowing-easiness between any pads in the plurality of pads at a state of removing all the ESD protection element from the semiconductor circuit;
- comparing current-flowing-easiness of a current path via the ESD protection element with current-flowing-easiness of a current path not via the ESD protection element between any pads in the plurality of pads based on the fourth and fifth tables;
- and
- indicating to an operator a combination and a path of the corresponding pads when the comparator determines that current-flowing-easiness of a current path via the ESD protection element does not coincide with current-flowing-easiness of a current path not via the ESD protection element between any pads in the plurality of pads.
6 more elements
Dependencies are inferred from the claim text.