Transfer device, processing system, control method of transfer device, and computer-readable storage medium

Abstract

A transfer device for transferring a transfer target object includes a support member, which is movable forward and backward, for supporting the transfer target object, and a sensor for detecting that a tip of the support member comes into contact with an obstacle when the support member moves forward. The sensor includes a first conductive ring having flexibility, which is provided at the tip of the support member in a grounded state, a second conductive ring provided inside the first conductive ring and separated from the first conductive ring, and a detector which detects that the first conductive ring and the second conductive ring are short-circuited when the first conductive ring comes into contact with the second conductive ring by being deformed due to a contact with the obstacle.

Dependencies are inferred from the claim text.