Method for eliminating the metal catalyst residues on the surface of wires produced by catalytic growth
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsSimon Perraud, Philippe Coronel
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Abstract
This method for eliminating the catalyst residues present on the surface of solid structures made from a first material and obtained by catalytic growth, includes the following steps: catalytic growth, from the catalyst residues, of solid structures made from a second material; selective elimination of said solid structures made from a second material.
Claims11
A method for eliminating catalyst residues present on the surface of solid structures made from a first material and obtained by catalytic growth, comprising the following steps:
- catalytically growing, from the catalyst residues, solid structures made from a second material;
- and
- selectively eliminating said solid structures made from the second material.
A method for producing solid structures made from a first material comprising the following steps:
- catalytically growing, from a catalyst, said solid structures made from the first material;
- and
- eliminating the catalyst residues present on the surface of said solid structures made from the first material, said eliminating step comprising:
- catalytically growing, from the catalyst residues, solid structures made from a second material;
- and
- selectively eliminating said solid structures made from the second material.
Dependencies are inferred from the claim text.