Stacked die assemblies including tsv die

Abstract

A method of through substrate via (TSV) die assembly includes positioning a plurality of TSV die with their topside facing down onto a curable bonding adhesive layer on a carrier. The plurality of TSV die include contactable TSVs that include or are coupled to bondable bottomside features protruding from its bottomside. The curable bonding adhesive layer is cured after the positioning. A plurality of second IC die each having a plurality of second bonding features are bonded onto the plurality of TSV die to form a plurality of stacked die assemblies on the carrier. Debonding after the bonding separates the carrier from the plurality of stacked die assemblies. The plurality of stacked die assemblies are then singulated to form a plurality of singulated stacked die assemblies.

Dependencies are inferred from the claim text.