Method and apparatus to fabricate polymer arrays on patterned wafers using electrochemical synthesis

A method for carrying out a chemical reaction on a plurality of dies on a wafer, the die comprising an electrode to generate a deprotecting reagent, a working electrode and a confinement electrode, wherein the method comprises:

• exposing the plurality of dies to at least one molecule having at least one protective group attached to a chemical functional group,
• applying a potential to the confinement electrodes of the plurality of dies to confine a reductive molecule or an oxidative molecule,
• electrochemically generating the deprotecting reagent,
• removing the protective group from the at least one molecule, and
• bonding the chemical functional group of the at least one molecule to the plurality of dies.

A method of manufacturing a plurality of dies, comprising:

• fabricating a wafer containing a CMOS circuitry to connect to individually addressable electrodes,
• fabricating the individually addressable electrodes for the plurality of dies on the wafer, the addressable electrodes comprising, an electrode to generate a deprotecting reagent, a working electrode to form a material and confinement electrodes to confine a reductive molecule or an oxidative molecule,
• interconnecting die pads by interconnects to carry out a chemical reaction on a plurality of working electrodes of the plurality of dies,
• performing the chemical reaction on the working electrodes of the plurality of dies.