Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same

A thin film deposition apparatus for forming a thin film on a substrate, the apparatus comprising:

• a deposition source for discharging a deposition material;
• a deposition source nozzle unit located at a side of the deposition source, the deposition source nozzle unit having a plurality of deposition source nozzles arranged in a first direction;
• a patterning slit sheet located opposite to the deposition source, the patterning slit sheet having a plurality of patterning slits arranged in the first direction;
• and
• a barrier plate assembly comprising a plurality of barrier plates that are arranged between the deposition source nozzle unit and the patterning slit sheet in the first direction, the barrier plate assembly partitioning a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces,
• wherein the thin film deposition apparatus and the substrate are movable relative to each other, and a relative movement direction between the substrate and the thin film deposition apparatus is at an angle greater than about 90° and less than about 180° with respect to the first direction.