Method of manufacturing micro lens array
AssigneeInha-Industry Partnership Institute
InventorsHan Sup Lee, Bong Guk Park, Chul-jin Jo, Ki Woon Choi
Life of this patent
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Abstract
A method of manufacturing a micro lens array, wherein the quality of an image is prevented from being deteriorated as a beam on an off-axis surface reaches a focal plane of a micro lens by forming a shading film for preventing the beam from penetrating through a space between micro lenses of the micro lens array, a micro lens having a high numerical aperture or any shape, such as an aspheric shape, is quickly manufactured at a low cost, and the micro lenses and a mask pattern are easily aligned by forming a mask pattern on a focus region formed by the micro lenses of the micro lens array.
Claims18
A method of manufacturing a micro lens, the method comprising:
- preparing a master plate having a plurality of molding grooves on one side, inside a vacuum chamber;
- forming a shading film for blocking a beam, by depositing a metal or coating ink or black matrix between the plurality of molding grooves;
- preparing a substrate constituting a raw material of a micro lens, inside the vacuum chamber;
- forming a vacuum inside the vacuum chamber;
- adhering the master plate and the substrate;
- heating the substrate;
- releasing the vacuum inside the vacuum chamber;
- and
- forming a micro lens by separating the master plate and the substrate.
A method of manufacturing a micro lens array comprising a plurality of micro lenses and a mask pattern where a focus is formed by the plurality of micro lenses, the method comprising:
- disposing a transparent film on which photoresist is coated at one side of the plurality of micro lenses;
- hardening the photoresist on a focus of the plurality of micro lenses by irradiating ultraviolet rays on the plurality of micro lenses;
- removing the photoresist except for a region where it is hardened;
- depositing a metal on the transparent film;
- and
- removing the photoresist on the transparent film.
A method of manufacturing a micro lens array comprising a plurality of micro lenses and a mask pattern where a focus is formed by the plurality of micro lenses, the method comprising:
- coating a black photoresist on one surface of the plurality of micro lenses;
- hardening the black photoresist on a focus of the plurality of micro lenses by irradiating ultraviolet rays on the plurality of micro lenses;
- and
- developing and removing a region of the black photoresist, which is hardened.
Dependencies are inferred from the claim text.