Needle-like microstructure and device having needle-like microstructure
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorYasunori YOSHIDA
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AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorYasunori YOSHIDA
Estimating the term…
A needle-like structure of silicon is provided. A crystalline silicon region is formed over a metal substrate by an LPCVD method, whereby whisker-like crystalline silicon which is a polycrystalline body and grows in the <110> direction or the <211> direction with {111} the plane as a twin boundary can be obtained. Whisker-like crystalline silicon grows while forming a twin crystal (introducing stacking faults), and an initial nucleus is provided so that the normal direction <111> of the twin boundary is always included in the plane perpendicular to the growth direction of whisker-like crystalline silicon (in a transverse cross section). Such a material is used as a negative electrode active material of a lithium-ion secondary battery and for a photoelectric conversion device such as a solar battery.
A microstructure comprising a polycrystalline silicon structure,
A photoelectric conversion device comprising:
A secondary battery comprising:
Dependencies are inferred from the claim text.