Coated article having boron doped zinc oxide based seed layer with enhanced durability under functional layer and method of making the same

A method for making a coated article, the method comprising the steps of:

• sputter-depositing from a substantially metallic target a dielectric layer comprising zinc oxide and boron on a glass substrate over at least one dielectric layer, wherein the substantially metallic target comprises at least about 85% zinc and about 0.01 to 8% boron;
• and
• sputter-depositing an IR reflecting layer comprising silver and/or gold on the glass substrate over and directly contacting the layer comprising zinc oxide doped with boron.

A sputtering target for sputter depositing a dielectric layer comprising boron-doped zinc oxide, wherein the target is substantially metallic, and comprises at least about 85% zinc and from about 0.02 to 5% boron.

A method for making a coated article, the method comprising the steps of:

• sputter-depositing a dielectric layer comprising zinc oxide doped with boron on a glass substrate over at least one dielectric layer, wherein the layer comprising zinc oxide doped with boron is deposited in a sputtering atmosphere comprising at least about 50% oxygen, more preferably at least about 60% oxygen;
• and
• sputter-depositing an IR reflecting layer comprising silver and/or gold on the glass substrate over and directly contacting the layer comprising zinc oxide doped with boron.