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US 2012/0070314 A1Published application
Micropump
AssigneeBayer Technology Services GmbH
InventorsJörg Mueller, Régulo Miguel Ramirez Wong
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Abstract
The invention relates to a positive displacement pump, constructed in microsystem technology, which is preferably used as a vacuum pump.
Claims8
Micropump, comprising at least
- an inlet,
- an outlet,
- a channel between the inlet and the outlet and
- a piston located in the channel,
- wherein the piston is a liquid which can be moved by means of an external field.
2 more elements
Dependencies are inferred from the claim text.