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AssigneeHitachi High-Technologies Corporation
InventorsYukari Yamada, Kyoungmo Yang, Junichi Kakuta
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Provided is a method of manufacturing a template matching template, as well as a device for manufacturing a template, by both of which high matching accuracy can be stably ensured without being affected by factors such as process variations. As an embodiment of the above, a method of manufacturing a template matching template, as well as a relevant deice, is proposed by both of which a template memorized in advance and an image acquired by a microscope are compared, thereby identifying a desired position, and by which a plurality of images at the identified location are acquired by template matching, and the aforementioned plurality of images are added and averaged, thereby manufacturing a new template.
A template-matching template creation method in which a desired location is identified by comparing a template stored in advance and an image acquired by a microscope, said template-matching template creation method comprising the steps of:
A template creation device that creates a template for identifying a desired location based on an image acquired by a microscope and based on a comparison with the microscope image, said template creation device comprising:
Dependencies are inferred from the claim text.