Lithography system arranged on a foundation, and method for arranging a lithography system on said foundation
OwnerJerry Peijsterinventor
Life of this patent
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Abstract
The invention relates to a vibration isolation requiring system, such as a lithography system, arranged on a foundation, for example part of the floor in the room where the lithography system is arranged, and a method for arranging a lithography system on a foundation. The lithography system is arranged on top of a rigid or solid base plate, wherein said base plate having one or more struts attached thereto for placing the lithography system onto the foundation, wherein the one or more struts are arranged at a side of the base plate facing the foundation, and wherein the base plate is provided with a cut-out or an opening for mounting equipment underneath a vacuum chamber of the lithography system.
Claims35
Lithography system arranged on top of a rigid or solid base plate, wherein said base plate having one or more struts attached thereto for placing the lithography system onto a foundation, wherein the one or more struts are arranged at a side of the base plate facing the foundation, and wherein the base plate is provided with a cut-out or an opening for mounting equipment underneath a vacuum chamber of the lithography system.
Base plate for supporting a vibration isolated lithography system, wherein the base plate comprises a bottom side that, in use, faces a foundation, wherein said bottom side is provided with struts or at least is prepared for receiving struts via screws or bolts, wherein said struts are arranged for arranging said base plate onto the foundation, such as a concrete foundation block.
Method for arranging a vibration isolation requiring system, such as a lithography system, on a foundation, said method comprising the steps of:
- providing a self-carrying rigid base plate having one or more struts attached thereto, wherein the one or more struts are attached to a side of said base plate that faces the foundation;
- placing said base plate with its struts onto said foundation;
- providing leveling means for adjusting the distance between the base plate and the foundation;
- adjusting the distance between the base plate and the foundation in order to obtain a desired leveling of the base plate;
- providing a curable resin material between the struts and the foundation;
- curing said resin material in order to provide a rigid connection between the foundation and the struts;
- and
- placing said system on top of said base plate.
Dependencies are inferred from the claim text.