Photoelectric conversion apparatus, imaging system, and photoelectric conversion apparatus manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsSATOSHI KATO, HIROFUMI TOTSUKA
Life of this patent
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Abstract
A photoelectric conversion apparatus having a pixel array region and a peripheral region includes a pixel array, a readout unit, an output unit, a plurality of output lines, and a color filter layer which is arranged in the pixel array region and the peripheral region and includes a color filter arranged above the plurality of pixels. The color filter layer extends to surround the output lines when viewed from a direction perpendicular to a surface of a semiconductor substrate, and has an opening arranged above the plurality of output lines. The opening of the color filter layer is filled with gas or an insulator lower in dielectric constant than the color filter.
Claims21
1-12. (canceled)
A photoelectric conversion apparatus having a pixel array region and a peripheral region positioned at a periphery of the pixel array region, the apparatus comprising:
- a pixel array which is arranged in the pixel array region and has a plurality of pixels;
- a readout unit which is arranged in the peripheral region to read out a signal from the pixel array;
- an output line group which is arranged in the peripheral region and has a plurality of output lines arranged such that a first plane passes through the plurality of output lines, the readout unit being configured to output signals to the plurality of output lines;
- and
- a color filter layer which is arranged in the pixel array region and the peripheral region,
- wherein the color filter layer includes a first portion arranged above the read out unit, and a substance having a dielectric constant that is lower than that of the color filter layer is present above the output line group, the first portion of the color filter layer and the substance being present such that a second plane parallel to the first plane passes through the first portion of the color filter layer and the substance.
A photoelectric conversion apparatus having a pixel array region and a peripheral region positioned at a periphery of the pixel array region, the apparatus comprising:
- a pixel array which is arranged in the pixel array region and has a plurality of pixels;
- a readout unit which is arranged in the peripheral region to read out a signal from the pixel array;
- an output line group which is arranged in the peripheral region and has a plurality of output lines arranged such that a first plane passes through the plurality of output lines, the readout unit being configured to output signals to the plurality of output lines;
- and
- a planarization layer which is arranged above the pixel array and the readout unit,
- wherein a gas is present above the output line group, the planarization layer and the gas being present such that a second plane parallel to the first plane passes through the planarization layer and the gas.
Dependencies are inferred from the claim text.