Apparatus and method for analyzing thermal properties of composite structures

An apparatus for analyzing thermal property of a showerhead having a gas distribution plate bonded to a base by a bonding material, comprising:

• an anti-reflective enclosure defining a working volume;
• a heat source disposed in the working volume;
• a structure support configured to support the showerhead so that the gas distribution plate faces the heat source;
• and
• a camera disposed in the working volume configured to capture thermal images of the gas distribution plate.

A method for analyzing condition of a bonding material within a composite structure having a first component coupled to a second component by the bonding material, comprising:

• positioning the composite structure on a structure support so that the first component is facing a heat source and the heat source and the second component are in opposite sides of the first component;
• directing a heat flux from the heat source towards the first component;
• capturing a thermal image of the component after the heat flux;
• building a temperature map of the first component from the captured thermal image;
• determining condition of the bonding material according to the thermal map.