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US 2012/0069094 A1Published application
Liquid ejection head and manufacturing method therefor
AssigneeCanon Kabushiki Kaisha
InventorsAkihiko Okano, Masahiko Kubota, Ryoji Kanri, Yoshiyuki Fukumoto, Masafumi Morisue
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Abstract
Provided is a liquid ejection head including a substrate including a liquid supply port and an energy generating element, in which the liquid supply port has at least one groove shape formed in a wall surface thereof, the at least one groove shape extending from a rear surface, which is a surface opposite to a front surface on which the energy generating element is formed, toward the front surface.
Claims15
A liquid ejection head, comprising a substrate including:
- a liquid supply port for supplying liquid to a liquid flow path which is provided in communication with an ejection orifice for ejecting the liquid;
- and
- an energy generating element for generating energy used for ejecting the liquid from the ejection orifice,
- wherein the liquid supply port has at least one groove shape formed in a wall surface thereof, the at least one groove shape extending from a rear surface, which is a surface opposite to a front surface on which the energy generating element is formed, toward the front surface.
1 more element
A manufacturing method of a liquid ejection head including a substrate including:
- a liquid supply port for supplying liquid to a liquid flow path which is provided in communication with an ejection orifice for ejecting the liquid;
- and an energy generating element for generating energy used for ejecting the liquid from the ejection orifice, the manufacturing method comprising:
- a step (1) of forming an etch resistant mask having an opening corresponding to the liquid supply port on a rear surface of the substrate having the energy generating element formed on a front surface side;
- and
- a step (2) of forming the liquid supply port by dry etching processing of the substrate with use of the etch resistant mask,
- wherein, in the step (1), a region around the opening of the etch resistant mask becomes thinner toward the opening.
3 more elements
Dependencies are inferred from the claim text.