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US 2012/0068690 A1Published application
Bulk acoustic wave resonator sensor
AssigneeSamsung Electronics Co., Ltd.
InventorsIn Sang Song, Sang Uk Son, Jea Shik Shin, Hyung Rak Kim
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Abstract
A bulk acoustic wave resonator (BAWR) sensor is provided. The BAWR sensor includes a signal BAWR that measures a resonance frequency that is modified due to a reaction with a target material, a reference BAWR that measures a reference resonance frequency without reaction with an external environment, and a sensing unit that senses the target material, based on the modified resonance frequency and the reference resonance frequency.
Claims24
A bulk acoustic wave resonator (BAWR) sensor, comprising:
- a signal BAWR configured to measure a resonance frequency that is modified due to a reaction with a target material;
- a reference BAWR configured to measure a reference resonance frequency without reaction with an external environment;
- and
- a sensing unit configured to sense the target material, based on the modified resonance frequency and the reference resonance frequency.
1 more element
An analysis device comprising:
- a bulk acoustic wave resonator (BAWR) sensor unit comprising:
- a signal BAWR configured to measure a resonance frequency that is modified due to a reaction with a target material;
- and
- a reference BAWR configured to measure a reference resonance frequency without reaction with the target material;
- and
- a sensing unit configured to sense the target material, based on the modified resonance frequency and the reference resonance frequency.
3 more elements
Dependencies are inferred from the claim text.