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US 2012/0068571 A1Published application
Capacitive micromachined ultrasonic transducer
AssigneeIndustrial Technology Research Institute
InventorJing-Kuang Chen
Life of this patent
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Abstract
A capacitive micromachined ultrasonic transducer (CMUT) is described, including a substrate, a conductive film disposed over the substrate, a conductive membrane suspended over the conductive film with a vacuum space underneath, and at least one anchoring post disposed under a middle of the conductive membrane and supporting the conductive membrane.
Claims20
A capacitive micromachined ultrasonic transducer (CMUT), comprising:
- a substrate;
- a conductive film disposed over the substrate;
- a conductive membrane suspended over the conductive film, with a vacuum space underneath;
- and
- at least one anchoring post disposed under a middle of the conductive membrane and supporting the conductive membrane.
2 more elements
A capacitive micromachined ultrasonic transducer (CMUT), comprising:
- a substrate having a V-shape cavity therein;
- a conductive film disposed over the substrate and in the V-shape cavity;
- and
- a conductive membrane suspended over the conductive film and in the V-shape cavity, with a vacuum space underneath.
1 more element
A capacitive micromachined ultrasonic transducer (CMUT), comprising:
- a substrate;
- a corrugated conductive film disposed over the substrate;
- and
- a corrugated conductive membrane suspended over and conformal with the conductive film, with a vacuum space underneath.
1 more element
Dependencies are inferred from the claim text.