Microsystems for converting pressures and compression
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorThierry Hilt
Life of this patent
Estimating the term…
Abstract
The invention relates to a microsystem for converting a difference in pressures in a fluid into mechanical movement, this microsystem comprising:—an inlet nozzle (6) for compressed fluid and an outlet nozzle (8) for expanded fluid,—at least two arms (12, 14), at least one of which is hinged and between which flows the fluid in order to pass from the inlet nozzle to the outlet nozzle by moving these arms with respect to one another, the arms (12, 14) being designed and hinged such that, while they move, they define at least one pocket of fluid which is moved away from the inlet nozzle in order then to return to the outlet nozzle while at the same time increasing in volume, each of the arms (12, 14) being mechanically connected to a single plane (20).
Claims24
1-16. (canceled)
An apparatus for converting a difference in pressures into a mechanical movement, said apparatus comprising a micro-system having:
- an inlet nozzle for compressed fluid,
- an outlet nozzle for expanded fluid, and
- at least two arms mechanically connected to a plane, at least one of which is movable,
- wherein, while passing from said inlet nozzle to said outlet nozzle, fluid flows between said arms and moves at least one of said arms relative to another of said arms,
- wherein, said arms are configured to define, in motion, a pocket of fluid that moves away from said inlet nozzle and toward said outlet nozzle, and
- wherein said pocket of fluid increases in volume as it proceeds from said inlet nozzle to said outlet nozzle.
An apparatus for compressing a fluid, said apparatus comprising a micro-system including:
- an inlet nozzle for an expanded fluid,
- an outlet nozzle for compressed fluid,
- at least two arms mechanically connected to a plane, at least one of said arms being movable, and
- an actuator for moving said arms,
- wherein, in response to mechanical movement of said arms relative to each other, fluid flows between said arms while passing from said inlet nozzle to said outlet nozzle,
- wherein said arms are formed and actuated so that, during their movement, said arms define at least one pocket of fluid that diminishes in volume while moving away from said inlet nozzle toward said outlet nozzle.
A method of manufacturing a micro-system a micro-system having:
- an inlet nozzle for compressed fluid, an outlet nozzle for expanded fluid, and at least two arms mechanically connected to a plane, at least one of which is movable, wherein, while passing from said inlet nozzle to said outlet nozzle, fluid flows between said arms and moves at least one of said arms relative to another of said arms, wherein, said arms are configured to define, in motion, a pocket of fluid that moves away from said inlet nozzle and toward said outlet nozzle, and wherein said pocket of fluid increases in volume as it proceeds from said inlet nozzle to said outlet nozzle, said method comprising simultaneously depositing or etching, on a substrate, arms imbricated with one another.
Dependencies are inferred from the claim text.