Magnetic Nano-Ring Device and Method of Fabrication
AssigneeU.S. Government as represented by the Secretary of the Army
InventorAlan S. Edelstein
Life of this patent
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Abstract
A magnetic nano-ring device and method of fabrication includes providing a substrate; forming at least one nano-pillar on the substrate; depositing a plurality of electrodes on the substrate; depositing an anti-ferromagnetic layer on a first electrode of the plurality of electrodes; depositing a first ferromagnetic layer on the anti-ferromagnetic layer; depositing a tunnel barrier layer on the first ferromagnetic layer; depositing a second ferromagnetic layer on the tunnel barrier layer; planarizing the nano-pillars and the second ferromagnetic layer to form a co-planar nano-pillar and second ferromagnetic layer; depositing a second electrode on the co-planar nano-pillar and second ferromagnetic layer; and forming a nano-structure ring in a substantially cylindrical configuration.
Claims10
1-11. (canceled)
A magnetic nano-ring device comprising:
- a substrate,
- a first electrode over said substrate having an approximate ring shaped structure;
- a plurality of cylindrical nana-pillars affixed to said substrate, wherein each nana-pillar comprises a top surface and a sidewall surface;
- an anti-ferromagnetic layer covering exposed areas of said substrate and a circular layer on the top surface of each nano-pillar in said plurality of nano-pillars;
- a first ferromagnetic layer a substantially circular geometry covering said antiferromagnetic layer;
- a tunnel barrier layer having an approximate ring shape covering said first ferromagnetic layer and the sidewall surface of each nano-pillar in said plurality at nano-pillars;
- a second ferromagnetic layer having an approximate ring shape covering said exposed areas of said tunnel barrier layer on said substrate and the top surface of each nano-pillar in said plurality of nano-pillars;
- and
- a second electrode having an approximate ring shape over said second ferromagnetic layer.
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Dependencies are inferred from the claim text.