Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the thin film deposition apparatus, and organic light-emitting display device manufactured by using the method

A method of manufacturing an organic light-emitting display device by a thin film deposition apparatus comprising a deposition, a deposition source nozzle unit, a patterning slit sheet, a first barrier plate assembly, and a second barrier plate, the method comprising:

• arranging the deposition source nozzle unit at a side of the deposition source, the deposition source nozzle unit comprising a plurality of deposition source nozzles arranged in a first direction;
• arranging the patterning slit sheet to face the deposition source nozzle unit, the patterning slit sheet comprising a plurality of patterning slits arranged in the first direction;
• arranging the first barrier plate assembly comprising a plurality of first barrier plates disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, and partitioning with the first barrier plates a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces;
• arranging the second barrier plate at one side of the patterning slit sheet, wherein an inner part of the second barrier plate is partitioned into a plurality of spaces by a plurality of barrier ribs of the second barrier plate;
• fixing a substrate fixed to a chuck;
• and
• discharging a deposition material from the deposition source and moving the film deposition apparatus or the substrate fixed to the chuck relative to each other while deposition is performed on the substrate.