Electrical contact structures suitable for use on wafer translators and methods of making same

Abstract

Electrical contact structures suitable for use on the wafer-side of wafer translators are produced using the programmable features of a wire-bonding machine and further using subsequent steps including but not limited to, masking, etching, grinding, and annealing. In one aspect, multiple electronic flame-off (EFO) operations are performed to produce both a free-air ball at one end of a wire for ball bonding, and to produce a region of modified grain structure in the wire at a predetermined distance from the free-air ball. The grain structure modification obtained by EFO operations affects the tail termination operation of the wire bonding machine thereby controlling, at least in part, the contact structure height and tip shape.

Dependencies are inferred from the claim text.