Laser irradiation apparatus, laser irradiation method, fabrication method for thin film semiconductor device and fabrication method for display apparatus
AssigneeSony Corporation
InventorsKeisuke Omoto, Minoru Nakajima, Masatoshi Inagaki
Life of this patent
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Abstract
A laser irradiation apparatus, including: an optical system configured to form laser light of a linear cross section to be irradiated on an irradiation object; and a cutting member having a light blocking portion configured to block the laser light formed in the linear cross section by the optical system to cut the laser light so as to have a predetermined length along a line longitudinal direction; the light blocking portion having a plurality of fins provided on the light blocking portion thereof so as to fetch and absorb the laser light.
Claims2
A for making a thin film semiconductor device, the method comprising the steps of:
- forming laser light of a linear cross section;
- cutting the laser light of the linear cross section so as to have a predetermined length in a line longitudinal direction using a cutting member which has a light blocking portion configured to block the laser light;
- and
- irradiating the laser light of the predetermined length in the line longitudinal direction on a semiconductor film to crystallize the semiconductor film,
- wherein,
- the cutting member has a plurality of fins on the light blocking portion, and
- the fins are configured to fetch and absorb the laser light.
A for making a display apparatus, the method comprising the steps of:
- forming laser light of a linear cross section;
- cutting the laser light of the linear cross section so as to have a predetermined length in a line longitudinal direction using a cutting member which has a light blocking portion configured to block the laser light;
- and
- irradiating the laser light of the predetermined length in the line longitudinal direction on a semiconductor film to crystallize the semiconductor film,
- wherein,
- the cutting member has a plurality of fins on the light blocking portion thereof, and
- the fins are configured to fetch and absorb the laser light.
Dependencies are inferred from the claim text.