Liquid Processing Method, Recording Medium Having Recorded Program for Executing Liquid Processing Method Therein and Liquid Processing Apparatus

An apparatus for processing a substrate comprising:

• a support unit rotatably installed and configured to support the substrate;
• a rotating unit configured to rotate the support unit;
• a first processing liquid supplying unit configured to supply a first processing liquid containing hydrofluoric acid to the rear surface of the substrate supported by the support unit;
• a second processing liquid supplying unit configured to supply a second processing liquid containing ammonia hydrogen peroxide mixture to the rear surface of the substrate supported by the support unit;
• a first opening/closing mechanism configured to switch between the first processing liquid supplying unit and the second processing liquid supplying unit;
• and
• a control unit configured to control the rotating unit and the first opening/closing mechanism,
• wherein the control unit controls the rotating unit and the first opening/closing mechanism so as to support the substrate formed with a titanium-containing film on its front surface and rear surface by a support unit, rotate the substrate along with the support unit by the rotating unit, supply the first processing liquid to the rear surface of the rotating substrate by the first processing liquid supplying unit, and, after processing with the first processing liquid, supply the second processing liquid to the rear surface of the rotating substrate by the second processing liquid supplying unit.