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US 2012/0067833 A1Published application
Support elements for an optical element
AssigneeCarl Zeiss SMT GmbH
InventorsJens Kugler, Ulrich Weber, Nicolai Wengert
Life of this patent
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Abstract
Support elements for an optical element and a method for supporting an optical element are disclosed. The disclosure can be used in connection with arbitrary optical apparatuses or optical imaging methods. In particular, the disclosure can be used in connection with the microlithography employed in the manufacture of microelectronic circuits.
Claims29
A support element for an optical element of a microlithography system, the support element comprising:
- a support member comprising a plurality of first flexures;
- a first connection element configured to connect the support member to an external support unit;
- and
- a second connection element configured to connect to the optical element,
- wherein:
- the support element is configured to cooperate with further support elements in a parallel kinematic fashion to position and orient the optical element relative to the external support unit in six degrees of freedom;
- the first connection element and/or the second connection element comprises a second flexure,
- each of the first and second flexures defines a bending axis,
- a motion restriction of the optical element relative to the external support unit is achievable in at most two degrees of freedom via the plurality of first and second flexures;
- and
- each of the first and second flexures is configured in an elongated manner along the bending axis.
8 more elements
A method, comprising:
- supporting an optical element of a microlithography system via a plurality of support elements on an external support unit and positioning and orienting the optical element in a parallel kinematic fashion in relation to the external support unit in six degrees of freedom,
- wherein:
- a support element has a support member which, via a first connection element, is connected to the external support unit and, via a second connection element, is connected to the optical element;
- the support member comprises a plurality of first flexures, and
- the first connection element and/or the second connection element has at least one second flexure,
- each of the first and second flexures defines a bending axis,
- via the plurality of first and second flexures a motion restriction of the optical element relative to the support unit is achievable in at most two degrees of freedom;
- and
- for each of the first and second flexures, a joint is used which is configured in elongated fashion along the bending axis.
6 more elements
Dependencies are inferred from the claim text.