Target assembly
AssigneesHon Hai Precision Industry Co., Ltd., HONG FU JIN PRECISION INDUSTRY (ShenZhen) CO., LTD.
InventorsHSIN-PEI CHANG, WEN-RONG CHEN, HUANN-WU CHIANG, CHENG-SHI CHEN, SHUN-MAO LIN
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Abstract
A target assembly includes a base comprising a first surface and a second surface opposite to the first surface. The base defining a threaded hole; a magnetron mounted on a first surface; a target movably mounted to the second surface, the target defining an opening corresponding to the threaded hole, the opening including a first end and a second end; and a screw. The screw can slide in the opening from the first end to the second end so the position between magnetron and the target is adjusted to adjust the bombarded area of the target.
Claims14
A target assembly, comprising:
- a base comprising a first surface and a second surface opposite to the first surface;
- a magnetron mounted on the first surface;
- and
- a target being adjustably positionable relative to the second surface to adjust a position between magnetron and the target.
A target assembly, comprising:
- a base comprising a first surface and a second surface opposite to the first surface, the base defining a threaded hole;
- a magnetron mounted on a first surface;
- and
- a target movably mounted to the second surface, the target defining an opening corresponding to the threaded hole, the opening including a first end and a second end;
- and
- a screw;
- wherein the screw can slide in the opening from the first end to the second end so a position between magnetron and the target is adjusted to adjust the bombarded area of the target.
A target assembly, comprising:
- a base comprising a first surface and a second surface opposite to the first surface, the base defining at least one threaded hole;
- a magnetron mounted on a first surface;
- a target is movably mounted to the second surface, the target defining at least one group of opening, and each group including a first opening and a second opening adjacent to the first opening;
- and
- at least one screw;
- wherein when each first opening is aligned with corresponding threaded hole, and each screw is inserted into corresponding first opening and tightly screwed in corresponding threaded hole, the target is held on the base in a first position;
- when each second opening is aligned with corresponding threaded hole, and each screw is inserted into corresponding second opening and tightly screwed in corresponding threaded hole, the target is held on the base in a second position.
Dependencies are inferred from the claim text.