Method and apparatus for producing three dimensional nano and micro scale structures
AssigneesUniversity of Surrey, The Secretary of State for Business Innovation 7 Skills of her Majesty's Britannic Government
InventorDavid Cox
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Abstract
A three-dimensional milling method and apparatus is disclosed for milling micrometre and a nanometre scale three-dimensional structures. The apparatus includes an ion column operable to generate a milling beam onto a substrate held on an instrument stage. A patterning computer is operable to control the ion column to generate varying ion beam and/or dwell times or to produce a plurality of milling passes, in which subsequent passes overlap previous passes at least partially to create three-dimensional structures. Optionally, an SEM column may be provided.
Claims21
A method of milling a three-dimensional form for the production of a three-dimensional structure in an article, including the steps of:
- determining a milling rate of a material to be milled in dependence on ion beam strength and dwell time;
- and
- milling by means of ion beam milling an article made of said material on the basis of the determined milling rate, wherein the milling step mills adjacent areas of the article at different depths to produce a shape varying in three dimensions.
A system for milling a three-dimensional pattern in a device, including:
- an ion column operable to generate an ion beam able to mill an object;
- a diagnostic system for determining or obtaining a milling rate of the material of the device based upon the ion beam strength and ion beam dwell time;
- a control unit for controlling the ion column on the basis of the determined milling rate and three-dimensional pattern to be milled;
- wherein the control unit is operable to mill adjacent areas of the device at different depths so as to produce a three-dimensional milled pattern.
21-33. (canceled)
Dependencies are inferred from the claim text.