Method of co-sputtering alloys and compounds using a dual C-MAG cathode arrangement and corresponding apparatus

A method of making a coated article comprising a film supported by a glass substrate, the method comprising:

• sputtering first and second sputtering targets, wherein at least one magnet of the second sputtering target is oriented so that during the sputtering of the second target second sputtering material from the second target is sputtered toward the first target, and during the sputtering of the first target first sputtering material of the first target and second sputtering material which was sputtered onto the first target from the second target is sputter-deposited onto the glass substrate to form the film which is substantially transparent;
• and
• orienting a plasma erosion zone of the first target so as to generally face a first direction which is substantially toward the substrate, and orientating a plasma erosion zone of the second target to generally face a second direction that is substantially toward the first target and is angled from about 70-170 degrees from the first direction.

A sputtering apparatus for sputter-depositing a film on a substrate, comprising:

• first and second adjacent sputtering targets with no other sputtering targets between the first and second sputtering targets, wherein at least one magnet of the second sputtering target is oriented so that during sputtering of the second target second sputtering material from the second target is sputtered toward the first target, and during sputtering of the first target first sputtering material of the first target and second sputtering material which was sputtered onto the first target from the second target is sputtered toward the substrate to form the film;
• wherein a plasma erosion zone of the first target is oriented so as to generally face a first direction which is substantially normal to the substrate, and a plasma erosion zone of the second target is oriented to generally face a second direction that is substantially toward the first target and is angled from about 70-170 degrees from the first direction.