Reactor lid assembly for vapor deposition
AssigneeAlta Devices, Inc.
InventorsGang He, Gregg Higashi, Khurshed Sorabji, Roger Hamamjy, Andreas G. Hegedus
Life of this patent
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Abstract
Embodiments of the invention generally relate to apparatuses for chemical vapor deposition (CVD) processes. In one embodiment, a reactor lid assembly for vapor deposition is provided which includes a first showerhead assembly and an isolator assembly disposed next to each other on a lid support, and a second showerhead assembly and an exhaust assembly disposed next to each other on the lid support, wherein the isolator assembly is disposed between the first and second showerhead assemblies and the second showerhead assembly is disposed between the isolator assembly and the exhaust assembly.
Claims9
-49. (canceled)
A reactor lid assembly for vapor deposition, comprising:
- a first showerhead assembly and an isolator assembly disposed next to each other on a lid support;
- and
- a second showerhead assembly and an exhaust assembly disposed next to each other on the lid support, wherein the isolator assembly is disposed between the first and second showerhead assemblies and the second showerhead assembly is disposed between the isolator assembly and the exhaust assembly.
A reactor lid assembly for vapor deposition, comprising:
- a first showerhead assembly, an isolator assembly, a second showerhead assembly, and an exhaust assembly consecutively and linearly disposed next to each other on a lid support, wherein the isolator assembly is disposed between the first and second showerhead assemblies and the second showerhead assembly is disposed between the isolator assembly and the exhaust assembly.
A reactor lid assembly for vapor deposition, comprising:
- a first showerhead assembly, an isolator assembly, a second showerhead assembly, and an exhaust assembly consecutively and linearly disposed next to each other on a lid support;
- and
- a temperature regulation system comprising at least one fluid passageway extending throughout the lid support and at least one inlet and at least one outlet coupled to and in fluid communication with the fluid passageway.
Dependencies are inferred from the claim text.