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US 2012/0067257 A1Published application
A Lateral Transfer System
AssigneePlasco Energy Group Inc.
InventorsMarc Bacon, Andreas Tsangaris
Life of this patent
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Abstract
A modular lateral transfer system for use in a horizontally oriented processing chamber is provided. Each module has the ability to deliver process gas in addition to moving the reactant material through the horizontally oriented processing chamber. The modular design enables the operator to remove and replace a module of the system, thereby substantially minimizing the downtime of the chamber required during servicing.
Claims15
A module for use with a lateral transfer system of a processing chamber, the module comprising:
- a module lateral transfer system configured to move a reactant material from a first location to a second location;
- and
- one or more module process gas supply systems configured to provide one or more process gases to interact with the reactant material.
Dependencies are inferred from the claim text.