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US 2012/0067124 A1Published application
Resonant sensing using extensional modes of a plate
AssigneeSand9, Inc.
InventorsGuiti Zolfagharkhani, Jan H. Kuypers, Alexei Gaidarzhy
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Abstract
A device or system that incorporates teachings of the present disclosure may include, for example, a resonant structure having a plate, a mass and a set of electrodes. The plate can have an extensional mode at a frequency when excited. The set of electrodes can be used to measure an acceleration of the mass when the acceleration of the mass changes the frequency of the plate. Other embodiments are disclosed.
Claims28
An apparatus, comprising:
- a resonant structure comprising:
- a mass;
- a plate coupled to the mass, wherein the plate has an extensional mode at a frequency when excited;
- and
- a plurality of electrodes coupled to the plate for delivering an excitation signal to the plate and for obtaining a measurement signal resulting from an acceleration of the mass which causes a modulation of the frequency of the extensional mode of the plate.
2 more elements
An apparatus, comprising:
- a plate;
- and
- a mass attached to the plate,
- wherein the plate has an extensional mode at a first frequency when excited along an axis, wherein the plate has a second frequency when the mass is moved along the axis by an external force, and wherein a difference between the first frequency and the second frequency is associated with an acceleration of the mass when moved.
1 more element
A method, comprising:
- exciting a plate of a resonant structure at an extensional mode having a frequency;
- and
- measuring an acceleration of a mass of the resonant structure when the acceleration of the mass changes the frequency of the plate.
Dependencies are inferred from the claim text.