Rotation Rate Sensor
AssigneeRobert Bosch GmbH
InventorsMirko Hattass, Benjamin Schmidt
Life of this patent
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Abstract
A micromechanical rotation rate sensor, in particular for use in motor vehicles, includes a substrate, at least one seismic mass, which is arranged in a sprung manner on the substrate, drive means for production of a periodic movement of the seismic mass, force detection means for detection of a Coriolis force, which acts on the seismic mass as a result of rotation about a rotation axis which is at right angles to the excitation direction, and measurement means, wherein the measurement means are designed for measurement of structural deviations of the rotation rate sensor.
Claims11
A micromechanical rotation rate sensor, comprising:
- a substrate;
- at least one seismic mass arranged in a sprung manner on the substrate;
- a drive mechanism configured to produce a periodic movement of the seismic mass;
- a force detection mechanism configured to detect a Coriolis force, which acts on the seismic mass as a result of rotation about a rotation axis which is at right angles to the excitation direction;
- and
- a measurement mechanism configured to measure structural deviations of the rotation rate sensor.
A method for producing a test signal for a measurement of the measurement sensitivity of a rotation rate sensor, comprising:
- producing an antiphase oscillation of at least two seismic masses on an oscillation plane;
- influencing a Coriolis force on the seismic masses;
- deflecting the seismic masses at right angles to the oscillation plane, based on the Coriolis force;
- influencing a stress on the rotation rate sensor;
- producing a structural deviation of the rotation rate sensor by the influencing stress;
- varying the measurement sensitivity of the rotation rate sensor based on the structural deviation;
- and
- producing a test signal, which is independent of the structural deviation of the rotation rate sensor, for measurement of the measurement sensitivity of the rotation rate sensor based on the measured structural deviation.
Dependencies are inferred from the claim text.