Cryopump system and method for controlling the cryopump system
AssigneeSumitomo Heavy Industries, Ltd.
InventorMasamichi Ando
Life of this patent
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Abstract
A cryopump system includes: a plurality of cryopumps; a plurality of compressor units arranged to operate in parallel in accordance with a control output, respectively, to supply refrigerant gas to the plurality of cryopumps; and a cryopump controller operative to determine the control output for each of the plurality of compressor units. The cryopump controller adjusts a preset value for at least one of the compressor units, the preset value being utilized to determine the control output, so that operation statuses of the respective compressor units are substantially equalized.
Claims8
A cryopump system comprising:
- a plurality of cryopumps;
- a plurality of compressor units arranged to operate in parallel in accordance with a control output, respectively, to supply refrigerant gas to the plurality of cryopumps;
- and
- a control unit operative to determine the control output for each of the plurality of compressor units,
- wherein the control unit adjusts a preset value for at least one of the compressor units, the preset value being utilized to determine the control output, so that operation statuses of the respective compressor units are substantially equalized.
A method for controlling a plurality of compressors operated in parallel to supply refrigerant gas to a plurality of cryopumps comprising:
- determining a control output for the plurality of compressors, respectively;
- and
- substantially equalizing operation statuses of the respective compressors by adjusting a preset value for at least one of the compressors, the value being utilized for determining the control output.
A cryopump system comprising:
- a plurality of cryopumps;
- a plurality of compressor units arranged to operate in parallel in accordance with a control output, respectively, to supply refrigerant gas to the plurality of cryopumps;
- and
- a control unit operative to determine the control output for each of the plurality of compressor units.
Dependencies are inferred from the claim text.