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US 2012/0066876 A1Published application
Creating an improved piezoelectric layer for transducers
OwnerJames D. Huffmaninventor
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Abstract
A method for forming a transducer, the method includes the steps of providing a substrate; providing a dielectric on the substrate; providing a first piezoelectric layer of the dielectric; providing a metal layer on the first piezoelectric layer; etching the metal layer to form a predetermined pattern having at least two electrodes; providing a second piezoelectric layer on the first piezoelectric layer and the etched metal layer; and etching a portion of the substrate surrounding the transducer to permit the transducer to move in a bender configuration.
Claims4
A method for forming a transducer, the method comprising the steps of:
- (a) providing a substrate;
- (b) providing a dielectric on the substrate;
- (c) providing a first piezoelectric layer of the dielectric;
- (d) providing a metal layer on the first piezoelectric layer;
- (e) etching the metal layer to form a predetermined pattern having at least two electrodes;
- (f) providing a second piezoelectric layer on the first piezoelectric layer and the etched metal layer;
- and
- (g) etching a portion of the substrate surrounding the transducer to permit the transducer to move in a bender configuration.
5 more elements
Dependencies are inferred from the claim text.