Multiple heater control system with expandable modular functionality
AssigneesWatlow Electronic Manufacturing Company, MKS Instruments, Inc.
InventorsYoufan Gu, Jeffrey D. Kiernan, Charles C. Lawhead, William C. Bohlinger, Eric E. Ellis, Curtis A. Foster, James P. Hentges, Mark Loius-Gilmer Hoven, James H. Kreisel, Shawn Leininger, Robert O. Moran, Kurt W. Peterson, Jason R. Powell, Dale T. Wolfe
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