Non-Linear Rasterized Contour Filters
AssigneeSynopsys, Inc.
InventorsZhijie Deng, James Patrick Shiely
Life of this patent
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AssigneeSynopsys, Inc.
InventorsZhijie Deng, James Patrick Shiely
Estimating the term…
A system includes a conversion module that preserves the shape of a contour when converting an image to a different resolution. The conversion module receives a first image and divides the first image into regions of pixel values. For each region, a contribution of the region to the pixel values in the second image is determined. The contribution is selected from a set of pre-determined contributions that are a nonlinear function of the values in the region, and the selection is made based at least in part on the values in the region. The contributions are accumulated together to generate a second image. The conversion module may be, for example, part of a design flow for an integrated circuit that connects a mask simulation stage with an optical simulation stage.
A non-transitory computer readable medium storing instructions that, when executed on a computer system, cause the computer system to carry out a method for converting a pixelized image of an e-beam exposure for a mask to a different resolution pseudoimage suitable for photolithography simulation while preserving a shape of a contour line defined by a threshold value for the e-beam exposure, the method comprising:
A non-transitory computer readable medium storing instructions that, when executed on a computer system, cause the computer system to carry out a method for converting a pixelized image to a different resolution while preserving a shape of a contour line defined by a threshold value, the method comprising:
A method for converting a pixelized image to a different resolution while preserving a shape of a contour line defined by a threshold value, the method comprising:
Dependencies are inferred from the claim text.