Method And Apparatus For Merging Multiple Geometrical Pixel Images And Generating A Single Modulator Pixel Image
AssigneeMicronic MyData Systems AB
InventorsLars Ivansen, Anders Osterberg
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Abstract
The present invention relates to customizing individual workpieces, such as chip, flat panels or other electronic devices produced on substrates, by direct writing a custom pattern. Customization can be per device, per substrate, per batch or at some other small volume that makes it impractical to use a custom mask or mask set. In particular, it relates to customizing a latent image formed in a radiation sensitive layer over a substrate, merging standard and custom pattern data to form a custom pattern used to produce the customized latent image. A wide variety of substrates can benefit from the technology disclosed.
Claims11
A method of forming a custom latent image in a radiation sensitive layer over a substrate, the method including:
- receiving standard pattern data on first data path;
- receiving custom pattern data on a second data path;
- resampling and merging the standard and custom pattern data to form a merged-rasterized pattern data that represents a physical, custom latent image to be formed in a radiation sensitive layer;
- and
- forming the custom latent image in the radiation sensitive layer from the merged-rasterized pattern data using a direct writing device.
Dependencies are inferred from the claim text.