Method for manufacturing an array-type nanotube layer of a thin-film solar cell
OwnerNan-Hui Yehinventor
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Abstract
A method for manufacturing an array-type nanotube layer for a thin-film solar cell comprises the steps of: preparing an isotropic Si-substrate; sputtering a metal Ti layer onto the isotropic Si-substrate; heat-treating the Ti-coated Si-substrate in a vacuum heat-treatment environment; annealing the Ti-coated Si-substrate in an annealing heat-treatment environment to produce an intermediate-phase metal Ti layer ; anodizing the intermediate-phase metal Ti layer so as to transform the intermediate-phase metal Ti layer into an array-type nanotube layer for the solar cell; and finally applying a reverse voltage to separate the array-type nanotube layer from the isotropic Si-substrate.
Claims11
A method for manufacturing an array-type nanotube layer for a thin-film solar cell, comprising the steps of:
- (a) preparing an isotropic Si-substrate;
- (b) sputtering a metal Ti layer onto the isotropic Si-substrate so as to form a unique Ti-coated Si-substrate;
- (c) heat-treating the Ti-coated Si-substrate in a vacuum heat-treatment environment so as to remove possible residual stresses between the metal Ti layer and the isotropic Si-substrate;
- (d) annealing the Ti-coated Si-substrate in an annealing heat-treatment environment so as to transform the metal Ti layer into an intermediate-phase metal Ti layer;
- (e) anodizing the intermediate-phase metal Ti layer so as to transform the intermediate-phase metal Ti layer into an array-type nanotube layer for the solar cell, wherein the array-type nanotube layer includes a plurality of TiO2 nanotubes arranged in a dense array-type manner;
- and
- (f) applying a reverse voltage to separate the array-type nanotube layer from the isotropic Si-substrate.
Dependencies are inferred from the claim text.