Spin injection source and manufacturing method thereof
AssigneeRiken
InventorsYasuhiro FUKUMA, Yoshichika Otani
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Abstract
The spin injection source comprises a nonmagnetic conductor, an MgO film, and a ferromagnet, and injects spin from the ferromagnet to the nonmagnetic conductor. The MgO film is annealed at temperature of between 300° C. and 500° C. The annealing duration is preferably between 30 and 60 minutes. By annealing, the oxygen vacancies increases and the electric resistance of MgO film decreases. And thus the spin injection efficiency in the spin injection source improves.
Claims6
A spin injection source for injecting spin from a ferromagnet to a nonmagnetic conductor, comprising:
- a nonmagnetic conductor;
- a low-resistance MgO film formed on the nonmagnetic conductor;
- and
- a ferromagnet formed on the nonmagnetic conductor;
- wherein the MgO film is annealed at temperature of between 300° C. and 500° C.
A spin injection source for injecting spin from a ferromagnet to a nonmagnetic conductor, comprising:
- a nonmagnetic conductor;
- a low-resistance MgO film formed on the nonmagnetic conductor;
- and
- a ferromagnet formed on the nonmagnetic conductor;
- wherein oxygen in the MgO film is decreased by 5% to 17%.
A spin injection source for injecting spin from a ferromagnet to a nonmagnetic conductor, comprising:
- a nonmagnetic conductor;
- a low-resistance MgO film formed on the nonmagnetic conductor;
- and
- a ferromagnet formed on the nonmagnetic conductor;
- wherein an interface resistance RI (fΩm2) and a thickness t (nm) of the MgO film satisfy the following relationship.
- R1∝eα-t,0.7≦α≦1.2
A spin injection source for injecting spin from a ferromagnet to a nonmagnetic conductor, comprising:
- a nonmagnetic conductor;
- a low-resistance MgO film formed on the nonmagnetic conductor;
- and
- a ferromagnet formed on the nonmagnetic conductor;
- wherein the MgO film has an interface resistance of 1 to 103 fΩm2 and a thickness of 2 nm or more.
A manufacturing method of a spin injection source for injecting spin from a ferromagnet to a nonmagnetic conductor which comprises a nonmagnetic conductor, a low-resistance MgO film formed on the nonmagnetic conductor, and a ferromagnet formed on the nonmagnetic conductor, the method comprising the steps of:
- forming a multi-layer structure of a nonmagnetic conductor, a MgO film, and a ferromagnet laminated in this order;
- and
- annealing the MgO film at temperature of between 300° C. and 500° C.
Dependencies are inferred from the claim text.