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US 2012/0057773 A1Published application
Inspection recipe generation and inspection based on an inspection recipe
AssigneeCamtek Ltd.
InventorsELDAD LANGMATZ, SHIMON KOREN, MENACHEM REGENSBURGER, ZEHAVA BEN-EZER
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Abstract
System, computer readable medium and method. The system includes (i) a data obtaining module arranged to obtain data about at least one portion of an inspected article; and (ii) a processor arranged to perform at least one processing operation of the data out of: (a) processing the data to provide the inspection recipe; and (b) processing the data, while utilizing the inspection recipe, to detect defects; wherein the inspection recipe comprises multiple zones of multiple types of zones; wherein a zone of a first type of zones differs from a zone of a second type of zone.
Claims28
A method for generating or utilizing an inspection recipe, the method comprising:
- obtaining, by an data obtaining module, data about at least one portion of an inspected article;
- wherein the inspected article comprises at least one object of a certain class;
- and
- performing, by a processor, at least one processing operation of the data out of:
- (a) processing the data to provide the inspection recipe;
- and
- (b) processing the data, while utilizing the inspection recipe, to detect defects;
- wherein the inspection recipe comprises an object model that comprises:
- the data representing values of pixels of the object (received from the sensing means);
- and
- at least one additional geometrical parameter selected out of at least:
- a shape of the object model;
- a size of the object model;
- a location of the object model;
- and
- an orientation of the object model.
13 more elements
A method for generating or utilizing an inspection recipe, the method comprising:
- obtaining, by an data obtaining module, data about at least one portion of an inspected article;
- and
- performing, by a processor, at least one processing operation of the data out of:
- (a) processing the data to provide the inspection recipe;
- (b) processing the data, while utilizing the inspection recipe, to detect defects;
- wherein the inspection recipe comprises multiple zones of multiple types of zones;
- wherein at least one zone of a first type of zones and least one other zone of a second type of zone partially overlap;
- wherein the types of zones comprise at least two out of a data collection zone, a data processing zone, and a response zone;
- wherein different data collection zones differ from each other by at least one data collection rule;
- wherein different data processing zones differ from each other by at least one data processing rule;
- and
- wherein different response zones differ from each other by at least one response rule.
9 more elements
A non-transitory computer readable medium that stores instructions for:
- obtaining data about at least one portion of an inspected article;
- wherein the inspected article comprises at least one object of a certain class;
- and
- performing at least one processing operation of the data out of:
- (a) processing the data to provide the inspection recipe;
- (b) processing the data, while utilizing the inspection recipe, to detect defects;
- wherein the inspection recipe comprises an object model of the certain class;
- wherein the data collection rules comprise optical illumination rules and optical collection rules;
- wherein the object model comprises:
- the data representing values of pixels of the object (received from the sensing means);
- and
- at least one additional geometrical parameter selected out of at least:
- a shape of the object model;
- a size of the object model;
- a location of the object model;
- and
- an orientation of the object model.
14 more elements
A non-transitory computer readable medium that stores instructions for:
- obtaining, by an data obtaining module, data about at least one portion of an inspected article;
- wherein the inspected article comprises at least one object of a certain class;
- and
- performing, by a processor, at least one processing operation of the data out of:
- (a) processing the data to provide the inspection recipe;
- (b) processing the data, while utilizing the inspection recipe, to detect defects;
- wherein the inspection recipe comprises multiple zones of multiple types of zones;
- wherein at least one zone of a first type of zones and least one other zone of a second type of zone partially overlap;
- wherein the types of zones comprise at least two out of a data collection zone, a data processing zone, and a response zone;
- wherein different data collection zones differ from each other by at least one data collection rule;
- wherein different data processing zones differ from each other by at least one data processing rule;
- and
- wherein different response zones differ from each other by at least one response rule.
10 more elements
A system comprising a data obtaining module and a processor;
- wherein data obtaining module is arranged to obtain data about at least one portion of an inspected article;
- wherein the inspected article comprises at least one object of a certain class;
- and
- wherein the processor is arranged to perform at least one processing operation of the data out of:
- (a) processing the data to provide the inspection recipe;
- (b) processing the data, while utilizing the inspection recipe, to detect defects;
- wherein the inspection recipe comprises an object model of the certain class;
- wherein the object model comprises:
- the data representing values of pixels of the object (received from the sensing means);
- and
- at least one additional geometrical parameter selected out of at least:
- a shape of the object model;
- a size of the object model;
- a location of the object model;
- and
- an orientation of the object model.
13 more elements
A system comprising a data obtaining module and a processor;
- wherein data obtaining module is arranged to obtain data about at least one portion of an inspected article;
- wherein the inspected article comprises at least one object of a certain class;
- and
- wherein the processor is arranged to perform at least one processing operation of the data out of:
- (a) processing the data to provide the inspection recipe;
- (b) processing the data, while utilizing the inspection recipe, to detect defects;
- wherein the inspection recipe comprises multiple zones of multiple types of zones;
- wherein at least one zone of a first type of zones and least one other zone of a second type of zone partially overlap;
- wherein the types of zones comprise at least two out of a data collection zone, a data processing zone, and a response zone;
- wherein different data collection zones differ from each other by at least one data collection rule;
- wherein different data processing zones differ from each other by at least one data processing rule;
- and
- wherein different response zones differ from each other by at least one response rule.
10 more elements
Dependencies are inferred from the claim text.