Device and method for inspecting polycrystalline silicon layer
AssigneeSamsung Display Co., Ltd.
InventorsAlexander VORONOV, Suk-Ho Lee, Jae-Seung Yoo, Kyung-Hoe Heo, Gyoo-Wan Han
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Abstract
A device for inspecting a polycrystalline silicon layer that is crystallized by receiving irradiated laser beams on a front side of the polycrystalline silicon layer includes: a light source configured to emit inspection beams to a rear side of the polycrystalline silicon layer; a light inspector configured to inspect the inspection beams reflected at the rear side of the polycrystalline silicon layer; and a controller that controls the light source and the light inspector.
Claims22
A device for inspecting a polycrystalline silicon layer that is crystallized by receiving irradiated laser beams on a front side of the polycrystalline silicon layer, the device comprising:
- a light source configured to emit inspection beams to a rear side of the polycrystalline silicon layer;
- a light inspector configured to inspect the inspection beams reflected on the polycrystalline silicon layer;
- and
- a controller for controlling the light source and the light inspector.
A method for inspecting a polycrystalline silicon layer that is crystallized by receiving irradiated laser beams on a front side of the polycrystalline silicon layer, the method comprising:
- emitting inspection beams to a rear side of the polycrystalline silicon layer;
- and
- inspecting and analyzing the inspection beams reflected on the polycrystalline silicon layer.
Dependencies are inferred from the claim text.