Surface plasmon resonance sensor using beam profile ellipsometry

A surface plasmon resonance sensor using beam profile ellipsometry, comprising:

• a vertical illumination type focused-beam ellipsometer, in which light is polarized, a part of the polarized light is focused to a metal thin film by using an objective lens part, and then the polarized light reflected from the metal thin film is detected;
• a surface plasmon resonance (SPR) sensing part which is provided at the objective lens part of the focused-beam ellipsometer so as to generate SPR according to an angle change of the polarized light, the SPR sensing part including:
• a first lens which is a converging lens for focusing a part of the polarized light;
• and a second lens which functions as a high numerical aperture objective lens for a microscope together with the first lens, and which is formed into a single spherical or aspherical lens or the group of spherical or aspherical lenses so as to have the metal thin film deposited at a lower side thereof;
• and
• a flow unit which supplies a buffer solution containing a bio material binding to or dissociation from the metal thin film generating surface plasmon,
• wherein the SPR and the ellipsometric phase change by change in an angle and a wavelength are simultaneously detected.