Liquid crystal display device and manufacturing method thereof
AssigneesPanasonic Liquid Crystal Display Co., Ltd., Hitachi Displays, Ltd.
InventorsKeisuke ISHIGURO, Yoichi SHINOKI
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Abstract
A flat, solid counter electrode is formed on an organic passivation film. Before forming an interlayer insulating film on the counter electrode, plasma ashing is performed. A surface of the organic passivation film is trimmed by the plasma ashing, forming an overhang. The plasma ashing not only trims a surface of the organic passivation film but also roughens a surface of the counter electrode. This increases a contact area between the interlayer insulating film and the organic passivation film or counter electrode, increasing the adhesiveness therebetween. Further, the plasma ashing eliminates the remainder of a resist on the counter electrode, increasing the adhesiveness of the interlayer insulating film.
Claims11
A liquid crystal display device comprising:
- a TFT substrate having a thin-film transistor (TFT) thereon;
- an organic passivation film disposed so that the organic passivation film covers the TFT;
- a flat, solid first electrode disposed on the organic passivation film and composed of a transparent conductive film;
- an interlayer insulating film disposed on the first electrode;
- a comb-shaped second electrode disposed on the interlayer insulating film and composed of a transparent conductive film;
- a counter substrate;
- a color filter disposed beneath the counter substrate;
- and
- a liquid crystal layer interposed between the TFT substrate and the counter substrate,
- wherein an upper portion of the organic passivation film is located below a lower portion of the first electrode at an edge of the first electrode.
A liquid crystal display device comprising:
- a TFT substrate having a thin-film transistor (TFT) thereon;
- an organic passivation film disposed so that the organic passivation film covers the TFT;
- a flat, solid first electrode disposed on the organic passivation film and composed of a transparent conductive film;
- an interlayer insulating film disposed on the first electrode;
- a comb-shaped second electrode disposed on the interlayer insulating film and composed of a transparent conductive film;
- a counter substrate;
- a color filter disposed beneath the counter substrate;
- and
- a liquid crystal layer interposed between the TFT substrate and the counter substrate,
- wherein the first electrode overhangs the organic passivation film at an edge of the first electrode.
A method for manufacturing a liquid crystal display device, the liquid crystal display device including a TFT substrate, a counter substrate, and a liquid crystal layer, the TFT substrate having a thin-film transistor (TFT) thereon, the TFT being covered by an organic passivation film, the counter substrate having a color filter therebeneath, the liquid crystal layer being interposed between the TFT substrate and the counter substrate, the method comprising the steps of:
- (a) forming a flat, solid counter electrode by depositing indium tin oxide (ITO) on the organic passivation film and patterning the ITO;
- (b) performing plasma ashing on the TFT substrate after step (a);
- and
- (c), after step (b), forming an interlayer insulating film and then forming a comb-shaped pixel electrode on the interlayer insulating film using ITO.
A method for manufacturing a liquid crystal display device, the liquid crystal display device including a TFT substrate, a counter substrate, and a liquid crystal layer, the TFT substrate having a thin-film transistor (TFT) thereon, the TFT being covered by an organic passivation film, the counter substrate having a color filter therebeneath, the liquid crystal layer being interposed between the TFT substrate and the counter substrate, the method comprising the steps of:
- (a) forming a flat, solid pixel electrode by depositing indium tin oxide (ITO) on the organic passivation film and patterning the ITO;
- (b) performing plasma ashing on the TFT substrate after step (a);
- and
- (c), after step (b), forming an interlayer insulating film and then forming a comb-shaped counter electrode on the interlayer insulating film using ITO.
Dependencies are inferred from the claim text.