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US 2012/0056947 A1Published application
Inkjet head and method of manufacturing the same
AssigneeToshiba Tec Kabushiki Kaisha
InventorsChiaki Tanuma, Shuhei Yokoyama, Ryuichi Arai, Ryutaro Kusunoki
Life of this patent
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Abstract
An inkjet head including: a nozzle plate including: a nozzle configured to eject ink; a first electrode formed to surround the nozzle; a piezoelectric film provided to surround the nozzle and in contact with the first electrode; and a second electrode formed in contact with the piezoelectric film and made of a metal material forming the nozzle; and an ink supply path for supplying the ink to the nozzle.
Claims13
An inkjet head comprising:
- a nozzle plate in which a nozzle having an ejection hole for ink;
- an ink supply path for supplying the ink to the nozzle;
- a first electrode formed to surround the ejection hole of the nozzle of the nozzle plate;
- a piezoelectric film configured to at least partially surround the ejection hole of the nozzle of the nozzle plate and cover the first electrode;
- and
- a second electrode configured to cover the piezoelectric film and made of a metal material.
3 more elements
An inkjet head comprising:
- a nozzle plate in which a plurality of nozzles having ejection holes for ink;
- an ink supply path for supplying the ink to the plurality of nozzles;
- a first electrode formed to at least partially surround the ejection hole of each of the nozzles of the nozzle plate;
- a piezoelectric film configured to at least partially surround the ejection hole of each of the nozzles of the nozzle plate and cover the first electrode;
- and
- a second electrode configured to cover the piezoelectric film and made of a metal material, the metal material forming the nozzle plate.
3 more elements
A method of manufacturing an inkjet head comprising:
- forming an insulating film on a substrate;
- forming a first electrode film on the insulating film and fabricating the first electrode film into a predetermined shape;
- forming a piezoelectric film of a predetermined shape to at least partially cover the first electrode;
- forming a second electrode film of a predetermined shape to at least partially cover the piezoelectric film and the insulating film;
- forming an ejection hole in the second electrode film and the insulating film;
- forming a mask pattern in the ejection hole;
- forming, on the second electrode film, with an electroforming method, an electrode forming a nozzle plate on an ink supply side;
- and
- removing the mask pattern.
6 more elements
A method of ejecting ink from an inkjet head, comprising:
- sending a driving signal to an electrode whereby the electrode causes a deformation in a piezoelectric film at least partially surrounding a nozzle, the deformed piezoelectric film facilitating an ejection of ink from the nozzle.
Dependencies are inferred from the claim text.