Piezoelectric element, liquid ejecting head, liquid ejecting apparatus, and methods for the manufacture thereof
AssigneeSeiko Epson Corporation
InventorsChikara Kojima, Eiju Hirai
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Abstract
A piezoelectric element, a liquid ejecting head and a liquid ejecting apparatus that have improved reliability are provided. Methods for the manufacture thereof are also provided. A piezoelectric element includes a vibration plate having a recess in a first surface, a first electrode formed in the recess, a piezoelectric layer formed on the vibration plate and the first electrode, and a second electrode formed on the piezoelectric layer, wherein an upper surface of the first electrode forms a continuous flat surface together with the first surface.
Claims12
A piezoelectric element comprising
- a vibration plate having a recess in a first surface,
- a first electrode formed in the recess,
- a piezoelectric layer formed on the vibration plate and the first electrode, and
- a second electrode formed on the piezoelectric layer, wherein
- an upper surface of the first electrode forms a continuous flat surface together with the first surface.
A method for manufacturing a piezoelectric element, comprising
- forming a recess in a vibration plate,
- forming a first electrode in the recess of the vibration plate,
- forming a piezoelectric layer on the vibration plate and the first electrode, and
- forming a second electrode on the piezoelectric layer, wherein
- the forming of the first electrode includes
- forming a conductive layer so as to fill the recess, and
- planarizing the multilayer structure by polishing it from the conductive layer side, and wherein
- the vibration plate is exposed by the planarization.
Dependencies are inferred from the claim text.