Piezoelectric element, piezoelectric actuator, liquid ejecting head, and liquid ejecting apparatus

Abstract

A piezoelectric element according to an embodiment of the invention includes a first electrode containing a noble metal, a first multilayer composite disposed on the first electrode, a second multilayer composite disposed on the first electrode with a distance from the first multilayer composite, an oxide film partly disposed on the surface of the first electrode between the first multilayer composite and the second multilayer composite, and a covering layer. The covering layer covers the side surfaces of the first and second multilayer composites, and the oxide film and the surface of the first electrode between the first multilayer composite and the second multilayer composite. The first multilayer composite and the second multilayer composite each include a piezoelectric layer, and a second electrode over the piezoelectric layer.

Dependencies are inferred from the claim text.